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STOCKER is used for the transfer and storage of wafer carriers between production processes in semiconductor cleanrooms. It supports efficient storage and retrieval of SEMI standard carriers such as FOUP, Cassette, Magazine and Tray, etc.; achieves AMR and OHT docking; is compatible with manual loading and unloading; strictly complies with the specifications of FED-209E and SEMI E88 (Stocker SEM); meets the strict requirements of high-cleanliness environment, high throughput efficiency and intelligent management.
With the continuous development of technology and the rising cost of logistics, more and more factories are paying attention to logistics automation.
Technical highlights
Equipment specifications and parameters
|
Name |
STOCKER |
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|
Payload |
20kg |
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|
Carrier Type |
FOUP, CASSETTE, Magazine, Tray |
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Size/Storage Capacity |
Customizable (2.1 * 8 * 2.8m prototype) |
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Input/Output Docking |
AGV/OHT/Manual |
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Pick-and-place Accuracy |
±0.5mm |
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Moving |
speed |
2m/s |
|
acceleration |
2m/s² |
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Lifting |
speed |
1.8m/s |
|
acceleration |
2m/s² |
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Cleanliness Level |
ISO Class 100, Class 1000 |
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Optional |
N ₂ sealing function* |
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Sorter function |
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stacker
Lifting speed:2m/s; Motor power: 2kw
Moving speed:2m/s; Motor power: 1.5KW;
Fork telescopic speed: 0.75m/s; Rotation time: 1s;
FOUP fork extension motor power: 750W;
MGZ fork extension motor power: 400W;
Walking Barcode positioning: accuracy ± 0.5mm